Micromechanical Resonators Based on Silicon Two-Dimensional Phononic Crystals of Square Lattice
نویسندگان
چکیده
منابع مشابه
Silicon two-dimensional phononic crystal resonators using alternate defects
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2012
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2011.2174416